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| Precision-processed products
on a micron level are intended to be used in semiconductor
equipment whose structure has become increasingly
sophisticated. These products can be used in applications
such as PFA, PTFE, PCTFE, and PEEK. |
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Varieties:
Bellows, Wafer guides, Wafer
chucks, Chambers, and Valve bodies |
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| Single baths are suitable for
the storage and mixing of high-purity chemical solutions
used for semiconductor equipment, and double baths
are suited for overflow cleaning inside semiconductor
equipment. We manufacture various baths, both in
single-unit molded types as well as welded types. |
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Varieties:
PTFE single baths (YS type), PTFE double
baths (YW type), and PFA single baths |
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| These tanks are commonly used
to store and weigh chemical solutions whose purity
has been increasing to allow application to semiconductor
equipment.We also provide very thin tanks in square
shapes, which can contribute to space saving in
locations where semiconductor equipment is installed. |
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Varieties:
PFA weighing tanks (MS type and MC
type),PFA waste liquid tanks (DC type)
ETFE protection tanks (CC type) |
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As the tendency towards higher
chemical solutions purity is growing, pressure-feed
using N2 gas is becoming the predominant method
for supplying chemical solutions.
The CS tanks are next-generation chemical solutions
supply tanks with an N2-based pressure-feed capability.
The liquid-wetted surface is made of a Super PFA
rotomolded tank material so as to prevent the elution
of metals. |
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Varieties:
2L, 7L, 10L, 30L, 50L, 80L, 100L, 200L,
and 250L |
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We design and manufacture chemical
solutions supply units and chemical solutions circulation
units that incorporate technology which we have
gained through many years of manufacturing fluororesin
products and super engineering plastics. Each unit
is designed using the optimal resin material for
the particular chemical.
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| Although conventional fluorine-containing
rubber cannot easily maintain its physical characteristics
against chemicals such as ethers, amines, ketones,
organic solvents, acids, or alkalis, Karlez R exhibits
stable physical characteristics with respect to
a large majority of these chemicals. In terms of
heat resistance, Karlez R , which is a type of rubber,
maintains its physical characteristics even at high
temperatures up to about 300℃. O-rings made of Karlez
R are used as the main O-rings in semiconductor
equipment. |
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Varieties:
4079, 6375, 1050LF, 2035, 3018, 4001,
8101, 8375, 2037, 8201, and 8385
Karlez R is a trademark of DuPont Dow Elastomers L.L.C
America. |
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Vespel R combines heat-resisting
and wear-resisting capabilities that surpass those
of Yodoflon (fluororesin). Vespel R displaces excellent
performance and durability, even under severe conditions
that do not permit the use of other resin or metallic
materials, such as high PV, very high or low temperatures,
no lubrication and vacuums.
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Varieties:
SP-1 (natural grade), SP-21 (wear-resistant
grade), SP-22 (creeping-resistant grade),
SP-211 (low-friction-coefficient grade), and SP-3 (vacuum
sliding grade)
VESPEL R is a trademark of DuPont America. |
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